Patent Number: 7,610,756

Title: Cooling/heating apparatus and mounting apparatus

Abstract: A cooling/heating apparatus for circulating the cooled or heated transfer medium to a load to thereby cool or heat the load includes a heat transfer medium circulation path and a Stirling heat engine. The Stirling heat engine includes a first and a second cylinder chamber; a first and a second piston for expanding or compressing an operation gas in the first and the second cylinder chamber; and a driving mechanism for driving the first and the second piston. When the driving mechanism is driven in a forward direction, the operation gas is expanded in the first cylinder chamber and its temperature decreases, thus cooling the heat transfer medium, whereas, when the driving mechanism is driven in a backward direction, the operation gas is compressed in the first cylinder chamber and its temperature increases, thus heating the heat transfer medium.

Inventors: Hatta; Masataka (Nirasaki, JP)

Assignee: Tokyo Electron Limited

International Classification: F01B 29/10 (20060101)

Expiration Date: 1/03/02017