Patent Number: 7,610,809

Title: Differential capacitive sensor and method of making same

Abstract: A differential capacitive sensor (50) includes a movable element (56) pivotable about a rotational axis (60). The movable element (56) includes first and second sections (94, 96). The first section (94) has an extended portion (98) distal from the rotational axis (60). A static layer (52) is spaced away from a first surface (104) of the moveable element (56), and includes a first actuation electrode (74), a first sensing electrode (64), and a third sensing electrode (66). A static layer (62) is spaced away from a second surface (106) of the moveable element (56) and includes a second actuation electrode (74), a second sensing electrode (70), and a fourth sensing electrode (72). The first and second electrodes (64, 70) oppose the first section (94), the third and fourth electrodes (66, 72) oppose the second section (96), and the first and second electrodes (68, 74) oppose the extended portion (98).

Inventors: McNeil; Andrew C. (Chandler, AZ), Lin; Yizhen (Gilbert, AZ), Miller; Todd F. (Scottsdale, AZ)

Assignee: Freescale Semiconductor, Inc.

International Classification: G01P 15/125 (20060101)

Expiration Date: 1/03/02017