Patent Number: 7,611,124

Title: Vacuum processing apparatus

Abstract: A grease supply mechanism is provided inside a vacuum transfer chamber. The grease supply mechanism includes: a grease storage part in a bottomed cylindrical shape storing grease therein; and a movable cover covering an opening of the grease storage part and sliding while being in contact with an inner wall of the grease storage part. When the cover is pressed and moved, the grease is supplied into a grease inlet via a grease supply port.

Inventors: Shindo; Takehiro (Nirasaki, JP)

Assignee: Tokyo Electron Limited

International Classification: F16K 51/00 (20060101)

Expiration Date: 1/03/02017