Patent Number: 7,611,319

Title: Methods and apparatus for identifying small lot size substrate carriers

Abstract: In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are adapted to block docking of substrate carriers that do not include the first docking features and to allow docking of substrate carriers that include the first docking features. Numerous other aspects are provided.

Inventors: Shah; Vinay (San Francisco, CA), Elliott; Martin R. (Round Rock, TX), Hudgens; Jeffrey C. (San Francisco, CA), Englhardt; Eric Andrew (Palo Alto, CA)

Assignee: Applied Materials, Inc.

International Classification: B65B 69/00 (20060101)

Expiration Date: 1/03/02017