Patent Number: 7,611,686

Title: Materials purification by treatment with hydrogen-based plasma

Abstract: The present invention relates to a purification method for removing impurities containing oxygen from materials, especially boron, by hydrogen-based plasma treatment. The present procedure allows for efficient removal of oxygen while avoiding a thermal treatment that would substantially change the structure of the treated material, or a treatment leaving a reducing agent within the treated material.

Inventors: Alekseeva; Anastasia (Moscow, RU), Kovnir; Kirill (Dresden, DE), Chizhov; Pavel (Moscow, RU), Baitinger; Michael (Dresden, DE), Grin; Yuri (Dresden, DE)

Assignee: Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.

International Classification: B01D 53/32 (20060101)

Expiration Date: 1/03/02017