Patent Number: 7,611,809

Title: Multi-layer, attenuated phase-shifting mask

Abstract: The present invention provides an attenuated phase shift mask ("APSM") that, in each embodiment, includes completely transmissive regions sized and shaped to define desired semiconductor device features, slightly attenuated regions at the edges of the completely transmissive regions corresponding to isolated device features, highly attenuated regions at the edges of completely transmissive regions corresponding to closely spaced or nested device features, and completely opaque areas where it is desirable to block transmission of all radiation through the APSM. The present invention further provides methods for fabricating the APSMs according to the present invention.

Inventors: Rolfson; J. Brett (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: G03F 1/00 (20060101)

Expiration Date: 1/03/02017