Patent Number: 7,611,810

Title: Charged beam processing apparatus

Abstract: A charged beam processing apparatus for processing an object to form structures on the object includes a processing chamber, a multi-charged beam optical system configured to generate a plurality of charged beams, and to converge and to deflect the plurality of charged beams to irradiate the object in the processing chamber with the plurality of charged beams, and a supply port configured to supply a gas into the processing chamber. The multi-charged beam optical system includes (i) a lens array, and (ii) a pattern forming plate configured to select a portion of the lens array to be used to form the structures. The charged beam processing apparatus includes a controller configured to control an exchange of the pattern forming plate in accordance with an arrangement pattern of the structures to be formed on the object.

Inventors: Okunuki; Masahiko (Tokyo, JP), Ono; Haruhito (Minamiashigara, JP), Wang; Shinan (Kashiwa, JP), Tamamori; Kenji (Ebina, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G03F 9/00 (20060101)

Expiration Date: 1/03/02017