Patent Number: 7,612,348

Title: Transverse magnetic field voltage isolator

Abstract: A voltage-isolating passageway for providing high voltage isolation between a component maintained at high DC voltage and a component maintained at a substantially lower voltage is described. The voltage-isolating passageway incorporates a transverse magnetic field across its passageway, which reduces the potential energy of charged particles (e.g., electrons) passing through the passageway. The voltage-isolating passageway includes a passageway and at least two magnets. The passageway has two openings and the two magnets are positioned along opposite and exterior surfaces of the passageway wherein the first and second magnets impose a magnetic field in a transverse direction with respect to a lengthwise axis of the passageway. In one embodiment, each of the passageways have small diameters and transfer gases at small flow rates. A support structure secures the passageways and magnets in position relative to each other and a magnetic shield encases the components to prevent the magnetic field from affecting external components.

Inventors: Gubbens; Alexander Jozef (Redwood City, CA), MacDonald; Niles Kenneth (San Jose, CA), Nasser-Ghodsi; Mehran (Hamilton, MA), Garcia; Rudy Flores (Union City, CA), Masnaghetti; Doug Keith (San Jose, CA)

Assignee: KLA-Technologies Corporation

International Classification: H01J 37/18 (20060101); H01F 7/02 (20060101)

Expiration Date: 1/03/02017