Patent Number: 7,612,931

Title: MEMS control system gain normalization

Abstract: A method and system for providing gain normalization in a MEMS control system and/or device includes moving a MEMS structure from a first position wherein light is redirected from a first input port to an output port to a second position wherein light is redirected from a second input port to the output port, dithering an orientation of the MEMS structure, monitoring an intensity of the dithered light and providing a feedback signal in dependence upon the monitored intensity, and using the feedback signal, determining a control loop gain for active alignment of the MEMS structure. Gain normalization is achieved by applying a fitting function, which is split into a gain control loop gain part and a mechanical part.

Inventors: Schneider; David (Melbourne, FL), Kanagy; Darrel (Melbourne, FL)

Assignee: JDS Uniphase Corporation

International Classification: G02B 26/00 (20060101)

Expiration Date: 1/03/02017