Patent Number: 7,612,932

Title: Microelectromechanical device with optical function separated from mechanical and electrical function

Abstract: A microelectromechanical (MEMS) device includes a first reflective layer, a movable element, and an actuation electrode. The movable element is over the first reflective layer. The movable element includes a deformable layer and a reflective element. The actuation electrode is between the deformable layer and the reflective element.

Inventors: Chui; Clarence (San Jose, CA), Endisch; Denis (Cupertino, CA), Kogut; Lior (Haifa, IL), Tung; Ming-Hau (San Francisco, CA), Tung; Yeh-Jiun (Santa Clara, CA), Chiang; Chih-Wei (Hsin-Chu, TW)

Assignee: IDC, LLC

International Classification: G02B 26/00 (20060101); G02B 26/08 (20060101)

Expiration Date: 1/03/02017