Patent Number: 7,632,478

Title: Process for producing silicon

Abstract: The present invention relates to a process for producing silicon by thermal decomposition of a gaseous mixture comprising monosilane, monochlorosilane and, if desired, further chlorosilanes, e.g. dichlorosilane.

Inventors: Poepken; Tim (Friesoythe, DE), Sonnenschein; Raymund (Frankfurt, DE)

Assignee: Degussa AG

International Classification: C01B 33/02 (20060101)

Expiration Date: 2/15/02018