Patent Number: 7,707,873

Title: Three-dimensional nanoscale metrology using FIRAT probe

Abstract: In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance over a selected portion of the gap, the change in distance at the selected portion orienting a probe tip of the force sensor for multi-directional measurement.

Inventors: Degertekin; Fahrettin L. (Decatur, GA)

Assignee: Georgia Tech Research Corporation

International Classification: G01B 5/28 (20060101)

Expiration Date: 5/04/12018