Patent Number: 7,707,965

Title: Processing apparatus and lid opening/closing mechanism

Abstract: A processing apparatus includes an openable/closable lid disposed on a process container, and an opening/closing mechanism configured to open/close the lid. The opening/closing mechanism includes a hinge structure swingably coupling the lid to one end of the process container, and a drive structure configured to swing the lid. The hinge structure includes a main shaft used as a rotation axis when the lid is swung by the drive structure, and an adjusting shaft located on a distal end side relative to the main shaft, for adjusting an angle of the lid.

Inventors: Yamashita; Jun (Amagasaki, JP)

Assignee: Tokyo Electron Limited

International Classification: C23C 16/00 (20060101); C23F 1/00 (20060101); H01L 21/306 (20060101)

Expiration Date: 5/04/12018