Patent Number: 7,708,854

Title: Work carrier and method of processing a workpiece

Abstract: Explained, inter alia, is a method in which a workpiece (52) to be processed is fastened to a work carrier (10) by means of a solid (62). The work carrier (10) is made of a porous material, e.g. of porous ceramic. This processing method permits simple manipulation of the wafer during the processing. In addition, the workpiece (52) can be easily separated from the work carrier (10) using a solvent.

Inventors: Kroninger; Werner (Vilshofen/Albersdorf, DE), Lang; Gunter (Nurnberg, DE)

Assignee: Infineon Technologies AG

International Classification: B32B 38/10 (20060101); B32B 37/10 (20060101); B32B 7/12 (20060101)

Expiration Date: 5/04/12018