Patent Number: 7,710,556

Title: Inspection system

Abstract: A substrate inspection system of a type that receives substrates disposed within a cassette and inspects a planar surface of the substrates with a read head, where the substrates are inspected while they are disposed within the cassette, and the read head is of a size to fit between adjacent substrates within the cassette. In this manner, the substrates do not need to be removed from the cassette, and no robotic arm is required to do so.

Inventors: McCord; Mark A. (Los Gatos, CA)

Assignee: KLA-Tencor Corporation

International Classification: G01N 21/00 (20060101)

Expiration Date: 5/04/12018