Patent Number: 7,710,557

Title: Surface defect inspection method and apparatus

Abstract: A surface defect inspection apparatus is structured to add detection signals of multi-directionally detected scattered lights to detect a tiny defect and to individually process the respective detection signals to prevent an error failing to detect an anisotropic defect.

Inventors: Oshima; Yoshimasa (Yokohama, JP), Nakao; Toshiyuki (Yokohama, JP), Matsui; Shigeru (Hitachinaka, JP)

Assignee: Hitachi High-Technologies Corporation

International Classification: G01N 21/00 (20060101); G01N 21/88 (20060101)

Expiration Date: 5/04/12018