Patent Number: 7,710,574

Title: Devices in miniature for interferometric use and fabrication thereof

Abstract: A device in miniature and fabrication of such a device for interferometric use is described, the device including a substrate with at least one deep reactive ion etching structure on at least one surface of the substrate forming an optical bench. The optical bench preferably comprises a moving stage, an actuator, one or more connector sockets and one or more optical components.

Inventors: Sin; Jeongsik (Keller, TX), Lee; Woo Ho (Flower Mound, TX)

Assignee: Board of Regents, The University of Texas System

International Classification: G01J 3/45 (20060101)

Expiration Date: 5/04/12018