Patent Number: 7,710,583

Title: Surface position measuring system, exposure method and semiconductor device manufacturing method

Abstract: There is provided a surface position measuring system which includes a reflectivity computing module which computes predictive reflectivities of a plurality of circuit patterns, an inspection light source which irradiates an inspection light onto each of a plurality of inspection areas, area by area, above the plurality of circuit patterns under irradiation conditions determined based on a corresponding each of the predictive reflectivities of the plurality of circuit patterns, and a photodetector which detects a reflected inspection light reflected from each of the plurality of inspection areas to detect a surface position of a corresponding each of the plurality of inspection areas.

Inventors: Kono; Takuya (Yokosuka, JP)

Assignee: Kabushiki Kaisha Toshiba

International Classification: G01B 11/14 (20060101)

Expiration Date: 5/04/12018