Patent Number: 7,711,239

Title: Microelectromechanical device and method utilizing nanoparticles

Abstract: A microelectromechanical device (MEMS) utilizing nanoparticles for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode assembly having a first surface; and a movable reflective electrode assembly with a second surface facing the first surface. The movable reflective electrode assembly is movable between a relaxed and actuated (collapsed) position. Particles are deposited over the transparent electrode assembly or over a sacrificial layer separating the two electrodes. The particles lead to dimples in the reflective surface of the moving electrode. The particles can be removed with the sacrificial layer or remain in final devices.

Inventors: Sasagawa; Teruo (Los Gatos, CA), Kogut; Lior (Sunnyvale, CA)

Assignee: QUALCOMM MEMS Technologies, Inc.

International Classification: G02B 6/00 (20060101); G02B 6/26 (20060101); G02B 6/42 (20060101)

Expiration Date: 5/04/12018