Patent Number: 7,711,504

Title: Method and system for performing optical proximity correction with process variations considerations

Abstract: A method for performing optical proximity correction with process variations considerations is disclosed. The maximum aerial gradient direction for a control point associated with an edge is initially determined. Then, a variational edge placement error E along the maximum aerial image intensity gradient direction of the control point is calculated. A determination is made whether or not |CEn| is equal to or greater than a manufacturing grid, where n is the direction perpendicular to a segment pointing outward, and C is a constant. If |CEn| is equal to or greater than a manufacturing grid, the edge is moved by -CEn.

Inventors: Pan; Zhigang (Austin, TX), Yu; Peng (Austin, TX)

Assignee: The Board of Regents, University of Texas System

International Classification: G06F 17/50 (20060101); G06F 17/00 (20060101)

Expiration Date: 5/04/12018