Patent Number: 7,713,052

Title: Processing method of fine structure and processing equipment for fine structure

Abstract: In a processing method of a fine structure according to the present invention, an opposed platen (211) is moved from a retreat position to a molding/processing position, so that a film (1) is pressed against a mold (5) and processed. Thereafter a second block (211b) is separated from a first block (211a). Thus, improvement of the cooling rate for the opposed platen (211) can be attained by reducing the total thermal capacity of the opposed platen (211) by reducing the volume of the opposed platen (211) in cooling and physically discharging heat stored in the opposed platen (211). Thus, cooling efficiency for the opposed platen (211) is improved, and the heat cycle of the opposed platen (211) can be reduced.

Inventors: Yorita; Jun (Hyogo, JP), Mikage; Katsunari (Hyogo, JP)

Assignee: Sumitomo Electric Industries, Ltd.

International Classification: B29C 51/42 (20060101); B29C 59/00 (20060101)

Expiration Date: 5/11/12018