Patent Number: 7,714,280

Title: Time-of-flight secondary ion mass spectrometer

Abstract: A time-of-flight secondary ion mass spectrometer comprises an ion source which generates cluster ions each comprised of two or more atoms, a pulsing mechanism which pulses the cluster ions, a selecting mechanism which selects ions having a specific mass number from the pulsed cluster ions and passes the selected ions in an ON state of the selecting mechanism, and, passes the pulsed cluster ions without the selecting in an OFF state of the selecting mechanism, and a time-of-flight mass spectrometric unit which measures a mass spectrum of secondary ions generated from a sample using a difference in time of flight when the sample is irradiated with the ions passed through the selecting mechanism.

Inventors: Komatsu; Manabu (Kawasaki, JP), Hashimoto; Hiroyuki (Yokohama, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: H01J 49/44 (20060101)

Expiration Date: 5/11/12018