Patent Number: 7,714,987

Title: Exposure apparatus

Abstract: An exposure apparatus includes a first optical unit configured to condense light from a light source, a catoptric integrator configured to form plural secondary light sources using light from the first optical unit, the catoptric integrator including plural cylindrical reflection surfaces having the same generatrix direction, an aperture stop arranged perpendicular to the generatrix direction, and a second optical unit configured to superpose light from each secondary light source onto an illumination surface, wherein the catoptric integrator includes plural integrator parts each having plural cylindrical reflection surfaces, and the plural integrator parts are arranged in a direction perpendicular to the generatrix direction and to an arrangement direction of the cylindrical reflection surfaces and located at an incident side of the aperture stop.

Inventors: Kajiyama; Kazuhiko (Utsunomiya, JP), Tsuji; Toshihiko (Utsunomiya, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G03B 27/72 (20060101)

Expiration Date: 5/11/12018