Patent Number: 7,714,997

Title: Apparatus for inspecting defects

Abstract: This invention is a defect inspection apparatus having a reflecting objective lens free from chromatic aberration, or an achromatic catadioptric lens, and a dioptric objective lens, and thus constructed to suppress changes in brightness due to multi-wavelength illumination (i.e., illumination with the irradiation light having a plurality of wavelength bands), to provide a clearer view of defects present on a sample, by means of selective wavelength detection in order to improve sensitivity, and to allow one spatial image on the sample to be acquired as different kinds of optical images.

Inventors: Shibata; Yukihiro (Fujisawa, JP), Maeda; Shunji (Yokohama, JP)

Assignee: Hitachi High-Technologies Corporation

International Classification: G01N 21/00 (20060101)

Expiration Date: 5/11/12018