Patent Number: 7,715,079

Title: MEMS devices requiring no mechanical support

Abstract: MEMS devices such as interferometric modulators are described having movable layers that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top and bottom electrode through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.

Inventors: Kogut; Lior (Haifa, IL), Tung; Ming-Hau (San Francisco, CA), Tung; Yeh-Jiun (Sunnyvale, CA)

Assignee: QUALCOMM MEMS Technologies, Inc.

International Classification: G02B 26/08 (20060101)

Expiration Date: 5/11/12018