Patent Number: 7,715,101

Title: Electromagnetic radiation pulse duration control apparatus and method

Abstract: Apparatus and methods are used for controlling electromagnetic radiation pulse duration in a lithographic apparatus. A dividing element is arranged to divide an electromagnetic radiation pulse into a first portion and a second portion. A prism receives, refracts, and subsequently emits the first portion of the electromagnetic radiation pulse. A directing element is arranged to direct the first and second portions of the electromagnetic radiation pulse parallel to a common optical axis. The first portion combines with the second portion to form a combined radiation beam pulse. The combined radiation beam pulse has a longer pulse duration than the divided electromagnetic pulse and experiences no corresponding loss in intensity.

Inventors: Botma; Hako (Eindhoven, NL)

Assignee: ASML Netherlands B.V.

International Classification: G02B 27/10 (20060101); G02B 27/14 (20060101)

Expiration Date: 5/11/12018