Patent Number: 7,715,459

Title: Laser system

Abstract: An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse which may comprise: a pulse having a nominal wavelength outside of the DUV range; a frequency converter converting to essentially the wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium operating at different repetition rates from that of the seed laser output; a beam divider providing the amplifier gain mediums with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.

Inventors: Brown; Daniel J. W. (San Diego, CA), Partlo; William N. (Poway, CA), Sandstrom; Richard L. (Encinitas, CA)

Assignee: Cymer, Inc.

International Classification: H01S 3/22 (20060101)

Expiration Date: 5/11/12018