Patent Number: 7,732,192

Title: Integrated chemical microreactor with large area channels and manufacturing process thereof

Abstract: The microreactor has a body of semiconductor material; a large area buried channel extending in the body and having walls; a coating layer of insulating material coating the walls of the channel; a diaphragm extending on top of the body and upwardly closing the channel. The diaphragm is formed by a semiconductor layer completely encircling mask portions of insulating material.

Inventors: Barlocchi; Gabriele (Comaredo, IT), Mastromatteo; Ubaldo (Bareggio, IT), Villa; Flavio Francesco (Milan, IT)

Assignee: STMicroelectronics S.r.l.

International Classification: C12N 1/10 (20060101)

Expiration Date: 2022-06-08 0:00:00