Patent Number: 7,765,020

Title: Graphical user interface for presenting multivariate fault contributions

Abstract: Methods and apparatuses for presenting multivariate fault contributions in a user interface are described. A user interface is provided to illustrate a fault for a sample manufactured by a process containing multiple variables, each having at least two components. The user interface presents one group of components of the multiple variables in a first axis and a second group of components of the multiple variables in a second axis and graphically illustrates contributions to the fault associated with the multiple variables by associating a contribution of each component in the one group of components of the multiple variables to each corresponding component in the second group of components of the multiple variables.

Inventors: Lin; Y. Sean (Irvine, CA), Schwarm; Alexander T. (Austin, TX)

Assignee: Applied Materials, Inc.

International Classification: G06F 19/00 (20060101); G06F 11/00 (20060101)

Expiration Date: 7/27/12018