Patent Number: 7,765,606

Title: Scanning probe apparatus

Abstract: A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

Inventors: Kusaka; Takao (Yokohama, JP), Yoshimatsu; Nobuki (Kawasaki, JP), Yasuda; Susumu (Tsukuba, JP), Seki; Junichi (Yokohama, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G01N 23/00 (20060101)

Expiration Date: 7/27/12018