Patent Number: 7,770,232

Title: Scanning probe microscope system

Abstract: A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.

Inventors: Saito; Akira (Hyogo, JP), Aono; Masakazu (Hyogo, JP), Kuwahara; Yuji (Hyogo, JP), Maruyama; Jyunpei (Hyogo, JP), Manabe; Ken (Hyogo, JP)

Assignee: Riken

International Classification: G01Q 30/02 (20100101)

Expiration Date: 8/03/12018