Patent Number: 7,784,178

Title: Higher performance barrier materials for containers of environmentally sensitive semiconductor fabrication devices

Abstract: Techniques associated with higher performance barrier materials for containers to contain one or more environmentally sensitive devices associated with semiconductor manufacture are generally described. In one example, an apparatus includes an enclosure to contain one or more environmentally sensitive devices associated with semiconductor manufacture, the enclosure comprising a liquid crystal polymer (LCP) to provide a barrier against at least water and oxygen and to reduce purging requirements, and a door coupled with the enclosure.

Inventors: Davison; Peter (Puyallup, WA)

Assignee: Intel Corporation

International Classification: H01K 3/22 (20060101)

Expiration Date: 8/31/12018