Patent Number: 7,784,352

Title: Apparatus for measuring pressure by using diaphragm and method of pressure measurement by using diaphragm

Abstract: The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein.

Inventors: Hong; Seung Soo (Daejeon, KR), Shin; Yong Hyeon (Daejeon, KR), Kim; Jin Tae (Daejeon, KR)

Assignee: Korea Research Institute of Standards and Science

International Classification: G01L 9/12 (20060101)

Expiration Date: 8/31/12018