Patent Number: 7,785,172

Title: Combinatorial processing including rotation and movement within a region

Abstract: Combinatorial processing including rotation and movement within a region is described, including defining multiple regions of at least one substrate, processing the multiple regions of the at least one substrate in a combinatorial manner, rotating a head in one of the multiple regions to perform the processing, and repositioning the head relative to the one of the multiple regions while rotating the head during the processing.

Inventors: Satitpunwaycha; Peter (Sunnyvale, CA), Endo; Richard (San Carlos, CA), Fresco; Zachary (Santa Clara, CA), Kumar; Nitin (Menlo Park, CA)

Assignee: Intermolecular, Inc.

International Classification: B24B 49/00 (20060101); B24B 1/00 (20060101)

Expiration Date: 8/31/12018