Patent Number: 7,785,998

Title: Methods of forming dispersions of nanoparticles, and methods of forming flash memory cells

Abstract: Some embodiments include methods of forming dispersions of nanoparticles. The nanoparticles are incorporated into first coordination complexes in which the nanoparticles are coordinated to hydrophobic ligands, and the first coordination complexes are dispersed within a non-polar solvent. While the first coordination complexes are within the non-polar solvent, the ligands are reacted with one or more reactants to convert the first coordination complexes into second coordination complexes that contain hydrophilic ligands. The second coordination complexes are then extracted from the non-polar solvent into water, to form a mixture of the second coordination complexes and the water. In some embodiments, the mixture may be dispersed across a semiconductor substrate to form a uniform distribution of the nanoparticles across the substrate. In some embodiments, the nanoparticles may then be incorporated into flash memory devices as charge-trapping centers.

Inventors: Millward; Dan (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: H01L 21/3205 (20060101); H01L 21/4763 (20060101)

Expiration Date: 8/31/12018