Patent Number: 7,820,127

Title: Method and apparatus for producing nitrogen trifluoride

Abstract: A method for producing nitrogen trifluoride related to the present invention is characterized in that a fluorine gas and an ammonia gas are fed into a tubular reactor and are reacted with each other in the presence of a diluting gas in a gaseous phase under the condition of no catalyst to produce a gas product mainly composed of nitrogen trifluoride and a solid product mainly composed of ammonium fluoride and/or acidic ammonium fluoride, and then the solid product attached to an inner wall of the tubular reactor is removed by means of a device for removing the solid product, which device is mounted to the tubular reactor.

Inventors: Ohno; Hiromoto (Kawasaki, JP), Ohi; Toshio (Kawasaki, JP), Sakai; Yuji (Kawasaki, JP)

Assignee: Showa Denko K.K.

International Classification: C01B 21/06 (20060101)

Expiration Date: 2018-10-26 0:00:00