Patent Number: 7,821,189

Title: Method for maintaining vacuum-tight inside a panel module and structure for the same

Abstract: This invention provides a method for maintaining vacuum of a panel module and a structure of the panel module. A sealing material is suspended inside the panel module right above an exhaust opening of the panel module connecting with an exhaust tube. After exhausting the inside of the panel module, the sealing material is heated and molten so as to drop down to seal the exhaust tube. As such, the panel module becomes vacuum-tight. During a subsequent annealing process to heat the exhaust tube to its melting temperature, ambient air is prohibited from flowing into the panel module.

Inventors: Peng; Chih-Ping (Hsinchu, TW), Shiau; Yun-Jiau (Hsinchu, TW)

Assignee: Industrial Technology Research Institute

International Classification: H01J 1/62 (20060101)

Expiration Date: 2018-10-26 0:00:00