Patent Number: 7,821,644

Title: Apparatus for visual inspection

Abstract: An apparatus is provided which reduces the dependency of the direction of polarization on channels of an image sensor so as to improve the sensitivity of inspection. In the apparatus, the direction of an illumination beam incident on a polarizing beam splitter is made to be substantially parallel to the longitudinal direction of a field of view of an image sensor projected on the polarizing beam splitter.

Inventors: Kamei; Mitsuhiro (Takahagi, JP), Shimura; Kei (Mito, JP)

Assignee: Hitachi High-Technologies Corporation

International Classification: G01B 9/02 (20060101)

Expiration Date: 2018-10-26 0:00:00