Patent Number: 7,821,647

Title: Apparatus and method for measuring surface topography of an object

Abstract: An apparatus for measuring surface topography of an object includes an optical arrangement capable of directing a first light beam at a surface of the object, providing a second light beam coherent with and spatially phase-shifted relative to the first light beam, and generating an interference beam from the second light beam and a reflection of the first light beam from the surface of the object. The apparatus further includes at least one line scan sensor for detecting and measuring the interference beam.

Inventors: LeBlanc; Philip Robert (Corning, NY), Schneider; Vitor Marino (Painted Post, NY), Trice; James Patrick (Corning, NY)

Assignee: Corning Incorporated

International Classification: G01B 11/02 (20060101)

Expiration Date: 2018-10-26 0:00:00