Patent Number: 7,822,494

Title: Method for generating and using a plasma processing control program

Abstract: A method is provided of generating and using a control program for a obtain plasma process. The method comprises obtaining predetermined process data defining, in a series of time steps, changes in at least one control parameter for the plasma process during the said process. Control data are generated from the process data, the control data defining the at least one control parameter at a plurality of discrete times within each step. The control data are presented graphically to a user, using an interactive display device. The control data are modified in response to the operation by the user of the interactive display device, so as to generate the control program.

Inventors: Goodyear; Andrew Leonard (Clevedon, GB), Rossbrook; Philip Douglas (Clevedon, GB)

Assignee: Oxford Instruments Plasma Technology Limited

International Classification: G05B 19/42 (20060101); G06F 9/44 (20060101); G05B 11/01 (20060101); C23F 1/00 (20060101); G05B 15/00 (20060101); H01L 21/00 (20060101); H01L 21/306 (20060101)

Expiration Date: 2018-10-26 0:00:00