Patent Number: 7,823,452

Title: Slip ring positive Z force liquid isolation fixture permitting zero net force on workpiece

Abstract: Apparatus for Scanning Acoustic Microscopy (SAM) of a semiconductor device including a substrate with an acoustic probe, The substrate has upper and lower surfaces. A sealed lower space provides an environment surrounding the lower surface. An upper ring structure formed above the upper surface includes an upper sealing ring in contact with the upper surface, with the upper sealing structure and the seal forming a dam for retaining the acoustic transmission fluid above the upper surface. A fixture base retains a lower sealing ring in contact with the lower surface surrounding the lower surface. An acoustic scanning probe positioned confronting the upper surface of the semiconductor device extending into the acoustic transmission fluid retained in contact with the upper surface.

Inventors: Baan; Robert L. (Wallkill, NY), Bailey; Carla A. (Poughkeepsie, NY), Jambrih; Vladimir (Kingston, NY), Katz; Robert P. (Lagrangeville, NY)

Assignee: International Business Machines Corporation

International Classification: G01N 29/04 (20060101)

Expiration Date: 2019-11-02 0:00:00