Patent Number: 7,823,470

Title: Cantilever and cantilever manufacturing method

Abstract: A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.

Inventors: Shigeno; Masatsugu (Chiba, JP), Matsuzawa; Osamu (Chiba, JP), Watanabe; Naoya (Chiba, JP), Nihei; Amiko (Chiba, JP), Inoue; Akira (Chiba, JP), Shirakawabe; Yoshiharu (Chiba, JP), Muramatsu; Hiroshi (Tokyo, JP), Yamamoto; Yuji (Hachioji, JP)

Assignee: Seiko Instruments Inc.

International Classification: G01Q 70/00 (20100101); G01B 21/30 (20060101); G01Q 70/10 (20100101)

Expiration Date: 2019-11-02 0:00:00