Patent Number: 7,824,098

Title: Composite mechanical transducers and approaches therefor

Abstract: Mechanical transducers such as pressure sensors, resonators or other frequency-reference devices are implemented under conditions characterized by different temperatures. According to an example embodiment of the present invention, a combination of materials is implemented for mechanical transducer applications to mitigate temperature-related changes at or near a selected turnover temperature. In one application, a material property mismatch is used to facilitate single-anchor transducer applications, such as for resonators. Another application is directed to a Silicon-Silicon dioxide combination of materials.

Inventors: Melamud; Renata (Palo Alto, CA), Kim; Bongsang (Albany, CA), Hopcroft; Matthew (San Francisco, CA), Chandorkar; Saurabh (Stanford, CA), Agarwal; Manu (Stanford, CA), Kenny; Thomas W. (San Carlos, CA)

Assignee: The Board of Trustees of the Leland Stanford Junior University

International Classification: G01P 15/08 (20060101); G01K 11/22 (20060101); G01R 3/00 (20060101)

Expiration Date: 2019-11-02 0:00:00