Patent Number: 7,824,618

Title: Sensor structure and method of fabricating the same

Abstract: Provided is a sensor structure comprising a heater and a temperature sensor at the center of a membrane having a well structure, allowing a temperature to be rapidly controlled with low power, and the object is analyzed using a conductivity change measured at two or more substrate temperatures with a pair of detecting electrode and a detecting layer implemented on the heater, wherein the sensing layer can include a conductive particle and a non-conductive organic composite.

Inventors: Kim; Yong Shin (Daejeon-Shi, KR), Kim; Yun Tae (Daejeon-Shi, KR), Yang; Hae Sik (Daejeon-Shi, KR), Kim; Young Jun (Daejeon-Shi, KR), Ha; Seung Chul (Gyeonggi-Do, KR), Yang; Yoon Seok (Gyeonggi-Do, KR)

Assignee: Electronics and Telecommunications Research Institute

International Classification: G01N 27/00 (20060101)

Expiration Date: 2019-11-02 0:00:00