Patent Number: 7,825,391

Title: Plasma-based EUV light source

Abstract: Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

Inventors: Shumlak; Uri (Seattle, WA), Golingo; Raymond (Seattle, WA), Nelson; Brian A. (Mountlake Terrace, WA)

Assignee: The University of Washington

International Classification: A61N 5/06 (20060101)

Expiration Date: 2019-11-02 0:00:00