Patent Number: 7,825,440

Title: Suspended-membrane/suspended-substrate monolithic microwave integrated circuit modules

Abstract: A suspended-membrane/suspended-substrate monolithic microwave integrated circuit module and method of making same. The device contains a plurality of active devices, such as transistors, a plurality of transmission mediums connected to the active devices; and a substrate having a first portion supporting the active devices and the transmission mediums thereon, and further having a plurality of discrete second portions extending from the first portion. The method teaches how to manufacture the device.

Inventors: Choudhury; Debabani (Thousand Oaks, CA)

Assignee: HRL Laboratories, LLC

International Classification: H01L 29/80 (20060101); H01L 29/40 (20060101); H01L 23/34 (20060101)

Expiration Date: 2019-11-02 0:00:00