Patent Number: 7,825,568

Title: Electro acoustic sensor for high pressure environments

Abstract: A composite acoustic wave device (AWD) which is adapted for operation at high ambient pressures is provided. The AWD comprises two piezoelectric plates in back to back relationship, with electrodes disposed between the plates. The plates are bonded so as to neutralize the effects of external pressure. Further disclosed is a sensor utilizing the AWD and methods for utilizing such AWD for physical measurements in high pressure environments. An optional cavity formed between the piezoelectric plates offers the capability to measure the pressure and to further neutralize the residual effects of the pressure on measurement accuracy.

Inventors: Andle; Jeffrey C (Falmouth, ME)

Assignee: Vectron International, Inc.

International Classification: H01L 41/04 (20060101); H01L 41/047 (20060101)

Expiration Date: 2019-11-02 0:00:00