Patent Number: 7,825,755

Title: Electrostatic micro actuator, electrostatic microactuator apparatus and driving method of electrostatic micro actuator

Abstract: A semiconductor substrate; a cantilever which is formed on the semiconductor substrate so as to face the semiconductor substrate with an air layer therebetween, the cantilever being made from an electrically conductive material or a semiconductor material, and the cantilever being mechanically movable; a photodiode which is formed so as to be connected in parallel to a capacitance that is constituted from the cantilever and the semiconductor substrate, and the photodiode being formed between an anchor portion which is a portion of the cantilever and the semiconductor substrate; and a power source which supplies voltage via a resistance on a side of the cantilever which is a connection point of a parallel circuit including both the capacitance and the photodiode so as to be backward bias to the photodiode, are included.

Inventors: Toshiyoshi; Hiroshi (Yokohama, JP), Fujita; Hiroyuki (Tokyo, JP), Yamauchi; Yuko (Atsugi, JP), Higo; Akio (Tokyo, JP), Kakushima; Kuniyuki (Yokohama, JP)

Assignee: The Foundation for the Promotion of Industrial Science

International Classification: H01H 51/22 (20060101)

Expiration Date: 2019-11-02 0:00:00