Patent Number: 7,826,037

Title: Radiation beam pulse trimming

Abstract: A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.

Inventors: Visser; Huibert (Zevenhuizen, NL), Noordman; Oscar Franciscus Jozephus (Eindhoven, NL), Vink; Henri Johannes Petrus (The Hague, NL), Meijerink; Marcus Gerhardus Hendrikus (The Hague, NL), Schreel; Koenraad Remi Andre (Veldhoven, NL), De Bruijn; Cornelis Cornelia (Sprundel, NL)

Assignee: ASML Netherlands B.V.

International Classification: G03B 27/72 (20060101); G02F 1/01 (20060101); G02F 1/00 (20060101); G03B 27/32 (20060101); G03B 27/54 (20060101); G03B 27/42 (20060101)

Expiration Date: 2019-11-02 0:00:00