Patent Number: 7,826,629

Title: Optical sensing in a directional MEMS microphone

Abstract: A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm.times.2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.

Inventors: Miles; Ronald N. (Newark Valley, NY), Degertekin; F. Levent (Decatur, GA)

Assignee: State University New York

International Classification: H04R 25/00 (20060101); G01H 1/00 (20060101); G01D 5/36 (20060101); G01B 11/02 (20060101)

Expiration Date: 2019-11-02 0:00:00